Micro electro mechanical systems (MEMS), devices, and technologies. Micromachining and microfabrication techniques, including planar thin-fi lm processing, silicon etching, wafer bonding, photolithography, deposition, and etching. Transduction mechanisms and modeling in different energy domains. Analysis of micromachined capacitive, piezoresistive, and thermal sensors/actuators and applications. Computer-aided design for MEMS layout, fabrication, and analysis.